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  section title: Products
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Sapphire MegPie Megasonic Transducer

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photo of ProSys Sapphire MegPie
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The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing. It applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve process efficiency and lower process time. It is easy to retrofit to your single-substrate processing tool.
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Features & Benefits
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Particle-neutral sapphire resonator – no particles added to the process
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Patented crystal bond to the resonator
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Patented RF connection to the crystal
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Redundant internal RTO temperature monitoring
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Available in 100mm - 450mm+
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Custom sizes available
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Sapphire resonator compatible with all processing chemistries
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Uniform direct acoustic energy applied to the process
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Increased process efficiency
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Reduced process time
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Reduced process chemistry usage
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No moving parts, no consumables
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Replaces brushes and nozzles
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Technical Specifications

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Power density: 0.05 – 2.0 Watts/cm2
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Standard operating frequency: 925 kHz; other frequencies available upon request
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Mounting height: 0.02”– 0.14” (0.5mm – 3.5mm)
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Process fluid temperature: 15°C - 60°C
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Process fluid required depends on the substrate size and RPM: 0.5 – 3.0 lpm
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Operating RPM: 1 – 100
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Nitrogen or CDA purge: 10 lpm
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Mounting with 3 x M6 female threaded bosses
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Use with IMPulse RF electronics
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Processes Supported

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Post-CMP cleaning   LIGA processes
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TSV processing   Mask cleaning
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Pre-SOIC bond cleaning   Etch assist
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SU-8 develop   Plating pre-cleaning
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Lift off   Pre-plating bubble removal
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Resist strip   Post-laser cleaning
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Quick Response
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Contact Us
for quick response on a quote or for additional product information
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Technical Information
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Specifications
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Processes Supported
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Product Note
with technical specifications and drawings (PDF)
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Related Products
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ProSys MegPie Product Family Overview info
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Dual Zone MegPie Megasonic Transducer info
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Dual Zone MegPie 300/450 Megasonic Transducer info
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450mm MegPie Megasonic Transducer info
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Stainless Steel MegPie Megasonic Transducer info
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IMPulse RF Power Supply with Integrated Microcontroller info
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© 2018 ProSys Inc.
     
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