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  section title: Products
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Plate Array Megasonic Transducer

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photo of ProSys Plate Array
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The ProSys Plate Array is a Megasonic transducer packaged and ready to bolt onto a process tank to form the bottom. It is available in sizes from small single-wafer to 450mm. Direct coupling of acoustic energy to your process chemistry improves uniformity and cleans at a much lower power than indirect designs.
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Features & Benefits
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Patented metallic bond and RF connections to the crystals
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Resonators are available in quartz, stainless steel, and sapphire
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RF matching network located in the housing for improved transmission efficiency
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Redundant RTD temperature monitoring of the transducer for improved reliability
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Sealed and ready to bolt to a tank
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Available in standard sizes for single and dual 100mm to 450mm
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Easy to repair if required
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Crystal-to-resonator bond is acoustically superior to an epoxy bond
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Robust, reliable design and construction
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Direct design provides better uniformity than indirect solutions
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60% lower RF power usage when compared to indirect designs
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Technical Specifications

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Standard operating frequency: 925 kHz; other frequencies available upon request
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Power densities up to 2 Watts/cm2
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Process fluid temperatures to 60°C
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Standard sizes available
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Custom sizes design and built in weeks
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Special sizes available for solar and 450mm
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Interfaces with the IMPulse RF electronics
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Processes Supported

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Wafer cleaning   Lift off
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Post-CMP cleaning   Resist strip
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BOEL cleaning   Mold and imprint master cleaning
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Solar cleans   Etch enhancement
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Mask cleaning   Plating assist and bubble removal
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Quick Response
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Contact Us
for quick response on a quote or for additional product information
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Technical Information
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Specifications
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Processes Supported
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Product Note
with technical specifications and drawings (PDF)
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Related Products
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IMPulse RF Power Supply with Integrated Microcontroller
info
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Phaser Array Megasonic Transducers info
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Immersible Array Megasonic Transducer info
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© 2018 ProSys Inc.
     
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