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top row of product images<empty>ProSys logo photo of ProSys Quartz Megasonic System photo of ProSys Tabletop Megasonic System photo of ProSys Solar Bar photo of ProSys IMPulse RF photo of ProSys Sapphire MegPie <empty>
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  section title: Products
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Immersible Array Megasonic Transducer

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photo of ProSys Immersible Array
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The ProSys Immersible Array is a Megasonic transducer that is designed to install into an existing process tank in minutes. The addition of acoustic energy to a processing bath can improve the efficiency and reduce the process time. Products are available that are compatible with solvents, acids, or bases.
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Features & Benefits
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Sealed enclosure made with stainless steel, PTFE, Kynar/PVDF, and CPVCC
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Resonators are made with quartz, stainless steel, and sapphire
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Patented crystal-to-resonator bond process
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Patented RF connection to the crystals
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Redundant RTD temperature monitoring of the transducer for improved reliability
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The array is designed to be easily repaired if required
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The crystal-to-resonator bond is accoustically superior to an epoxy bond
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The design and construction are robust and reliable
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The direct design provides better uniformity than indirect solutions
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60% lower RF power usage when compared to indirect designs
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Technical Specifications

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Standard operating frequency: 925 kHz; other frequencies available upon request
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Power densities up to 2 Watts/cm2
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Process fluid temperatures to 60°C
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Standard sizes available
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Custom sizes designed and built in weeks
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Special sizes available for solar and 450mm
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Interfaces with the IMPulse RF electronics
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Processes Supported

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Wafer cleaning   Lift off
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Post-CMP cleaning   Resist strip
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BOEL cleaning   Mold and imprint master cleaning
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Solar cleans   Etch enhancement
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Mask cleaning   Plating assist and bubble removal
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Quick Response
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Contact Us
for quick response on a quote or for additional product information
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Technical Information
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Specifications
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Processes Supported
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Product Note
with technical specifications and drawings (PDF)
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Related Products

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IMPulse RF Power Supply with Integrated Microcontroller
info
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Phaser Array Megasonic Transducers info
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Plate Array Megasonic Transducer info
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© 2018 ProSys Inc.
     
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