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  section title: Products
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ProSys Applications Overview

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Using high-frequency acoustic energy, our advanced megasonics technology enables you to more tightly control your process and to make it faster and more efficient.
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Problems we solve include:
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FEOL and BEOL cleans
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Post-CMP/polish cleaning
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Photoresist develop and strip, including thick resist
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TSV & HAR cleaning and residual polymer removal
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LIGA/MEMS process applications
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Pre-bond cleaning
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Mask cleaning
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Solar process applications
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Contact us to explore how we can help with your specific cleaning or processing challenges.
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Quick Response

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Contact us to discuss how ProSys Megasonics can help with your specific cleaning or processing challenges.
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